Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

1990-06-15

1992-09-01

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73727, 338 4, 338 42, G01L 906

Patent

active

051429128

ABSTRACT:
Pressure sensor having a silicon diaphragm chip. The diaphragm in the chip is less than 200 mils in diameter and has an ultrasonic resonant frequency that varies with pressure exerted on it. The chip has resistors with values that change with fluctuation of the chip. The changing resistor values are fed to a supporting electronics that detect the resonant frequency of the diaphragm and indicate measurement of the pressure exerted on the diaphragm. The supporting electronics feed back a signal corresponding to the detected resonant frequency for a sensed pressure to a piezoelectric device that drives the diaphragm to sustain its vibration.

REFERENCES:
patent: 3456508 (1969-07-01), Frische
patent: 4098133 (1978-07-01), Frische et al.
patent: 4764244 (1988-08-01), Chitty et al.
patent: 4825335 (1989-04-01), Wilner

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