Semiconductor pressure sensor

Details Semiconductor pressure sensor Semiconductor pressure sensor

1999-04-15

2000-05-02

Fuller, Benjamin R.

Measuring and testing

Fluid pressure gauge

Electrical

73715, G01L 900, G01L 708

Patent

active

060558652

ABSTRACT:
A semiconductor pressure sensor having a sensor element including a sensor chip to which pressure from a pressure medium is applied, and a pedestal for supporting the sensor chip. The sensor element is bonded to a subplate at the pedestal, and the subplate is bonded to a main plate. The main plate includes an airtightness holding means for holding an airtight seal between the main plate and a sensor mounting part and disposed where pressure of a pressure medium can be detected.

REFERENCES:
patent: 4314225 (1982-02-01), Tominaga et al.
patent: 4315236 (1982-02-01), Tominaga et al.
patent: 4541282 (1985-09-01), Auerweck et al.
patent: 5207102 (1993-05-01), Takahashi et al.
patent: 5591917 (1997-01-01), Takeuchi
patent: 5614678 (1997-03-01), Kurtz et al.

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