Semiconductor pressure detection device

Details Semiconductor pressure detection device Semiconductor pressure detection device

1979-10-25

1981-11-17

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73727, 338 4, 338 7, 338 42, G01L 1904

Patent

active

043003958

ABSTRACT:
A semiconductor pressure detection device is provided which is adapted to detect pressure using resistors formed in the surface area of a semiconductor substrate and having a piezo-effect. A diode is formed in the surface area of the semiconductor substrate and a drive voltage corresponding to a temperature variation is supplied to a bridge circuit through the diode.

REFERENCES:
patent: 3836796 (1974-09-01), Solomon et al.
patent: 4202218 (1980-05-01), Romo
Honeywell Report, "The Diffused Silicon Approach to Differential Pressure Measurement", by John A. Weaver, pp. 103-110.

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