Semiconductor pressure detecting device

Details Semiconductor pressure detecting device Semiconductor pressure detecting device

1998-08-18

2000-02-08

Oen, William

Measuring and testing

Fluid pressure gauge

Electrical

G01L 920, G01L 916

Patent

active

060216735

ABSTRACT:
A semiconductor pressure detecting device comprises a package having a pressure introducing hole, a base plate which has a first through hole at the center thereof and is bonded on the periphery thereof to the inside of the package so that the first through hole becomes concentric with the pressure introduction hole, a mount which has a second through hole at the center thereof and is mounted on the base plate so that the second through hole becomes concentric with the first through hole and located inside the bonding portion of the package and the base plate, and a semiconductor pressure sensor chip, wherein the base plate has a groove which surrounds the mount at a position inside of the bonding portion.

REFERENCES:
patent: 4790192 (1988-12-01), Knecht et al.
patent: 5062302 (1991-11-01), Petersen et al.
patent: 5454270 (1995-10-01), Brown et al.
patent: 5510645 (1996-04-01), Fitch et al.

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