Semiconductor pressure-detecting apparatus

Details Semiconductor pressure-detecting apparatus Semiconductor pressure-detecting apparatus

1991-10-02

1993-05-11

Wood, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

296211, 73706, 73721, 128675, 338 4, G01L 708, G01L 906

Patent

active

052091201

ABSTRACT:
A semiconductor pressure-detecting apparatus includes a semiconductor chip having a diaphragm and a frame molded within a resin with the diaphragm exposed. A reference pressure chamber may be provided between the diaphragm and the frame. Since the diaphragm is exposed, a medium, the pressure of which is to be measured, easily contacts the diaphragm. Therefore, if the stem is connected to a case containing the medium, a high pressure can be measured.

REFERENCES:
patent: 4691575 (1987-09-01), Sonderegger et al.
patent: 4823605 (1989-04-01), Stein
patent: 4838089 (1989-06-01), Okada et al.

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