Semiconductor pressure converter

Details Semiconductor pressure converter Semiconductor pressure converter

1977-11-22

1979-09-25

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Diaphragm

338 4, 338 42, G01L 906

Patent

active

041686306

ABSTRACT:
A semiconductor pressure converter includes a silicon pressure sensing element, a silicon base hermetically attached to the sensing element to bear the element and a metal pipe connected to the silicon base so as to introduce a pressure to the sensing element through the silicon base.

REFERENCES:
IEEE Transactions on Electron Devices, vol. ED-16, No. 10, Oct. 1969, p. 870, E. R. Peake et al.

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