Semiconductor preheater with inclined rotary feed

Details Semiconductor preheater with inclined rotary feed Semiconductor preheater with inclined rotary feed

1992-05-11

1994-04-19

Reynolds, Bruce A.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

324158F, 432124, H01L 2100

Patent

active

053047796

ABSTRACT:
An apparatus for preheating semiconductor devices including a base having a slanted surface, a frame mounted on the slanted surface, a rotary shaft mounted between support plates of the frame, storage chutes radially provided between rotary disks fixed to the rotary shaft for containing semiconductors to be heated therein, a heater surrounding the storage chutes for heating the storage chutes, a motor for rotating the storage chutes at a predetermined angle, a sensing unit for sensing the supply and discharge of semiconductor devices to and from the storage chutes and the rotational angle of the rotary shaft, and a discharging unit for discharging semiconductor devices from the storage chutes. The semiconductor devices contained in the storage chutes are supplied and discharged to and from the storage chutes by use of a single inlet and outlet and are heated while rotating the storage chutes at a predetermined angle, thereby obtaining a uniform heating of semiconductor devices and an automation of preheating procedure.

REFERENCES:
patent: 2855113 (1958-10-01), Roske
patent: 3748089 (1973-07-01), Boyer et al.
patent: 4790438 (1988-12-01), Wilhelm et al.
patent: 5009590 (1991-04-01), Mitarai et al.
patent: 5100315 (1992-03-01), Schodorf et al.
patent: 5121052 (1992-06-01), Nickerson
patent: 5207987 (1993-05-01), Kureshy et al.

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