Abrading – Abrading process – Side face of disk
Patent
1993-08-31
1995-03-07
Lavinder, Jack W.
Abrading
Abrading process
Side face of disk
451 41, 451548, B24B 704
Patent
active
053946553
ABSTRACT:
The invention is to a polishing pad 14 that has a polishing surface 19 in which portions 17 and 18 of the polishing surface 19 have been removed. The removed areas 17 and 18 are annular rings adjacent an outer 15 and inner 16 edges of the polishing pad 14. The non-polishing surfaces 18 and 19 taper 17a and 18a downward from the polishing surface 19.
REFERENCES:
patent: 1622942 (1927-03-01), Chase
patent: 5177908 (1993-01-01), Tuttle
patent: 5243790 (1993-09-01), Gagne
Allen Franklin L.
Debner Thomas G.
Olmstead Dennis L.
Smith William L.
Brady III Wade J.
Donaldson Richard L.
Franz Warren L.
Lavinder Jack W.
Texas Instruments Incorporated
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