Semiconductor piezoresistive strain transducer

Details Semiconductor piezoresistive strain transducer Semiconductor piezoresistive strain transducer

1976-02-12

1977-05-24

Albritton, C. L.

Electrical resistors

Strain gauge type

73 885SD, G01L 122

Patent

active

040258904

ABSTRACT:
A semiconductor piezoresistive strain transducer having a reduced neck with an hour-glass configuration interconnecting two pads, wherein the reduced neck and the pads have configurations the relation between which prevents corner tips of the pads from coming into contact with a surface of the slender center region of the reduced neck and producing a micro-defect on it, whereby the danger of breaking at the reduced neck is reduced.

REFERENCES:
patent: 3351880 (1967-11-01), Wilner

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