Semiconductor piezoresistive sensor and operation method...

Measuring and testing – Fluid pressure gauge – Electrical

Reexamination Certificate

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C073S715000, C073S721000, C438S053000

Reexamination Certificate

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07448278

ABSTRACT:
A semiconductor piezoresistive sensor, which is electrically connected with a circuit, includes a semiconductor base, at least one piezoresistive element and a conductive layer. The semiconductor base includes a diaphragm and a base. The base is disposed adjacent to and around the diaphragm. The piezoresistive element is formed in the diaphragm and is electrically connected with the circuit. The conductive layer is electrically connected with the diaphragm.

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patent: 6383823 (2002-05-01), Takahashi et al.
patent: 6649989 (2003-11-01), Benzel et al.
patent: 7284443 (2007-10-01), Sato et al.

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