Measuring and testing – Fluid pressure gauge – Diaphragm
Patent
1996-03-18
1997-09-02
Dombroske, George M.
Measuring and testing
Fluid pressure gauge
Diaphragm
73777, G01L 906
Patent
active
056635079
ABSTRACT:
A novel GaAs/AlGaAs piezoelectric FET strain sensing transducer is disclosed. An embodiment of the strain sensing transducer includes a single piezoelectric crystal structure forming a cantilever arm and having an FET at the fixed cantilever base. Circuitry connected to measure changes in the conductivity of the FET Channel provides an output signal indicative of the measured strain produced by small forces which alter the conductance of the FET due to piezoelectric effects.
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AUTHOR: Conragan, J. TITLE: Piezoelectric field-effect transistor strain transducers.
Beck Rex G.
Westervelt Robert M.
Dombroske George M.
Noori Max H.
President and Fellows at Harvard College
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