Semiconductor pick-and-place machine calibration apparatus

Details Semiconductor pick-and-place machine calibration apparatus Semiconductor pick-and-place machine calibration apparatus

1991-10-25

1993-09-28

Noland, Tom

Measuring and testing

Inspecting

437 8, H01L 2166

Patent

active

052478440

ABSTRACT:
An apparatus and method of performing a calibration of the accuracy of placement of semiconductor chips or devices by a pick-and-place machine. The chips are placed on an adhesive-backed glass plate that has calibrated etch marks whose dimensions are chosen to aid the inspector in estimating, or carefully measuring in an optic comparator, the amount of placement error that the machine is causing. The calibration would be performed on a periodic basis as a preventive maintenance program.

REFERENCES:
patent: 3416566 (1969-08-01), Gerstner
patent: 3497948 (1970-03-01), Wiesler et al.
patent: 3715242 (1973-02-01), Daniel
patent: 4465549 (1984-08-01), Ritzman
patent: 4941255 (1990-07-01), Bull
"Testing News", Fuji News (Sep. 1990), part 3, pp. 10-13.

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