Semiconductor physical quantity sensor with stopper portion

Details Semiconductor physical quantity sensor with stopper portion Semiconductor physical quantity sensor with stopper portion

1998-12-11

2000-05-23

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351438, 3612833, G01P 15125

Patent

active

060653418

ABSTRACT:
A mass portion of a movable portion is supported by an anchor portion protruding from a substrate through a beam portion. A stopper portion fixed to the substrate through another anchor portion is disposed on a side opposite to the mass portion with respect to the beam portion to define a gap with the beam portion. The stopper portion is electrically connected to the beam portion through the anchor portions. Accordingly, the movable portion is restricted from being displaced in a direction generally parallel to a surface of the substrate, and a movable electrode of the movable portion is prevented from being attached to the fixed electrode.

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