Semiconductor photoelectric conversion device and method of maki

Details Semiconductor photoelectric conversion device and method of maki Semiconductor photoelectric conversion device and method of maki

1989-03-09

1990-11-20

Simmons, David

Fishing, trapping, and vermin destroying

437101, 437173, 148DIG3, 148DIG4, 1562722, 1562733, 156603, 156DIG80, 65 33, H01L 3118

Patent

active

049719190

ABSTRACT:
The present invention relates to a semiconductor photoelectric conversion device which has a laminate member composed of a plurality of PIN structures formed one on the other. The manufacturing method includes a laminate member forming step and an electrode forming step. In the laminate member forming step, the first and second PIN structures and the transparent conductive layers are formed. In the electorde forming step a metal layer is annealed to form a metal silicide layer and the remaining metal layer is removed.

REFERENCES:
patent: 4379943 (1983-04-01), Yang et al.
patent: 4387265 (1983-06-01), Dalal
patent: 4472456 (1984-09-01), Shah
patent: 4514579 (1985-04-01), Hanak
patent: 4536607 (1985-08-01), Wiebmann
patent: 4543443 (1985-09-01), Moeller et al.
patent: 4659422 (1987-04-01), Sakurai

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