Semiconductor photo-detection device and radiation apparatus

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation

Reexamination Certificate

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Details

C257S465000

Reexamination Certificate

active

10829385

ABSTRACT:
On the front side of an n-type semiconductor substrate5, p-type regions7are two-dimensionally arranged in an array. A high-concentration n-type region9and a p-type region11are disposed between the p-type regions7adjacent each other. The high-concentration n-type region9is formed by diffusing an n-type impurity from the front side of the substrate5so as to surround the p-type region7as seen from the front side. The p-type region11is formed by diffusing a p-type impurity from the front side of the substrate5so as to surround the p-type region7and high-concentration n-type region9as seen from the front side. Formed on the front side of the n-type semiconductor substrate5are an electrode15electrically connected to the p-type region7and an electrode19electrically connected to the high-concentration n-type region9and the p-type region11. This realizes a semiconductor photodetector and radiation detecting apparatus which can favorably suppress the occurrence of crosstalk, and restrain carriers from flowing into adjacent photodiodes even when a photodiode falls into an electrically floating state because of a breakage of a connecting point due to an initial connection error, a temperature cycle, etc.

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