Semiconductor PH sensor and circuit and method of making same

Details Semiconductor PH sensor and circuit and method of making same Semiconductor PH sensor and circuit and method of making same

1996-11-21

1998-09-29

Cain, Edward J.

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Means for analyzing liquid or solid sample

422 8202, 422 8203, 422 8204, G01N 2100

Patent

active

058142800

ABSTRACT:
A pH sensor having an ISFET is provided on a crystalline substrate of silicon with a thin film of aluminum oxide formed to have epitaxial growth with an overlaying thin film of silicon epitaxial grown on the aluminum oxide layer. A source element and a drain element are provided on the silicon film, and a pH responsive film layer is connected to the source and drain. The pH sensor can be accompanied with appropriate circuitry also integrally formed on the same epitaxial SOI substrate.

REFERENCES:
patent: 4505799 (1985-03-01), Baxter
patent: 5068205 (1991-11-01), Baxter et al.

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