Semiconductor package with integral hermeticity detector

Electricity: conductors and insulators – Feedthrough or bushing – Compression

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174 52S, 324 65R, 338 35, 357 26, H01L 2316

Patent

active

039435571

ABSTRACT:
The operation of relative humidity sensors made from cobalt oxide on a non-conductive ceramic substrate is improved by heating the sensor for a short period to a high temperature in a reducing atmosphere. This reduces the specific resistance of the device. With a lower resistivity, it is possible to reduce the size of the sensor to the point where it can be included along with a semiconductive device in standard hermetic packages. This makes possible the continuous, one-line monitoring of hermeticity for the life of the circuit without the necessity fo applying a load to the circuit.

REFERENCES:
patent: 3404215 (1968-10-01), Burks et al.
patent: 3471753 (1969-10-01), Burks et al.
patent: 3479572 (1969-11-01), Pokorny
patent: 3497774 (1970-02-01), Hornberger et al.
patent: 3600650 (1971-08-01), Obenhaus
patent: 3657805 (1972-04-01), Johnson
patent: 3820152 (1974-06-01), Booth

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