Semiconductor package with getter formed over an irregular...

Active solid-state devices (e.g. – transistors – solid-state diode – Housing or package

Reexamination Certificate

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C438S665000, C438S058000, C438S143000

Reexamination Certificate

active

07732902

ABSTRACT:
A semiconductor package includes a substrate having a first surface portion in a cavity. The first surface portion includes an artificially formed grass structure. The package includes a getter film formed over the grass structure.

REFERENCES:
patent: 5773362 (1998-06-01), Tonti et al.
patent: 6306740 (2001-10-01), Hattori
patent: 6524949 (2003-02-01), Kaneko et al.
patent: 6645861 (2003-11-01), Cabral et al.
patent: 6813178 (2004-11-01), Campbell et al.
patent: 6822880 (2004-11-01), Kovacs et al.

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