Semiconductor device manufacturing: process – Including control responsive to sensed condition
Reexamination Certificate
2011-07-19
2011-07-19
Warden, Jill (Department: 1773)
Semiconductor device manufacturing: process
Including control responsive to sensed condition
C438S006000, C438S007000, C438S008000, C438S009000, C438S010000, C438S011000, C438S012000, C438S013000, C438S014000, C438S016000, C438S017000, C438S018000, C438S400000, C438S432000
Reexamination Certificate
active
07981700
ABSTRACT:
A semiconductor oxidation apparatus is provided with a sealable oxidation chamber defined by walls, a base provided within the oxidation chamber and configured to support a semiconductor sample, a supply part configured to supply water vapor into the oxidation chamber to oxidize a specific portion of the semiconductor sample, a monitoring window provided in one of the walls of the oxidation chamber and disposed at a position capable of confronting the semiconductor sample supported on the base, a monitoring part provided outside the oxidation chamber and capable of confronting the semiconductor sample supported on the base via the monitoring window, and an adjusting part configured to adjust a distance between the base and the monitoring part.
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Itoh Akihiro
Jikutani Naoto
Sato Shun'ichi
Umemoto Shinya
Yamamoto Takatoshi
Cooper & Dunham LLP
Ricoh & Company, Ltd.
Turk Neil
Warden Jill
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