Semiconductor optical modulator, mach-zehnder optical...

Details Semiconductor optical modulator, mach-zehnder optical... Semiconductor optical modulator, mach-zehnder optical...

2005-03-01

2005-03-01

Epps, Georgia (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S237000, C359S245000, C385S002000

Reexamination Certificate

active

06862124

ABSTRACT:
A semiconductor optical modulator, a Mach-Zehnder optical modulator employing the same, and a method of manufacturing a semiconductor optical modulator that are suitable for high-speed baseband communication are provided. An optical waveguide core layer is formed in such a manner that it alternately crosses micro optical modulator elements and gap regions, which are formed by placing electrically insulating material at predetermined intervals on an electrically conductive substrate. The core layer is connected to a signal electrode portion via a conductive semiconductor portion in each micro optical modulator element. A ground electrode is connected to the core layer via the conductive substrate. Further, the signal electrode portions are connected in a series to form a signal electrode by means of in-between metal wirings. Conductive semiconductor material is located between the core layer and the electrodes. In the gap regions, the core layer is sandwiched between insulating semiconductor layers.

REFERENCES:
patent: 6600842 (2003-07-01), Yamada
patent: 20030103709 (2003-06-01), Grinberg et al.
patent: 20030190107 (2003-10-01), Walker
patent: 3422279 (2003-04-01), None

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