Semiconductor optical devices

Details Semiconductor optical devices Semiconductor optical devices

1994-06-14

1995-10-17

Bovernick, Rodney B.

Coherent light generators

Particular active media

Semiconductor

372 43, 372102, 372 96, 372 45, H01S 3106, H01S 318

Patent

active

054597471

ABSTRACT:
A semiconductor optical device includes a first semiconductor layer, and a diffraction grating disposed on the first semiconductor layer. The diffraction grating includes portions of a superlattice layer grown on the first semiconductor layer and including alternatingly arranged second semiconductor layers of a semiconductor material in which mass transport hardly occurs, during growth of other semiconductor layers and third semiconductor layers of a semiconductor material different from the material of the second semiconductor layers. The device includes a fourth semiconductor layer burying the diffraction grating. In this structure, since the second semiconductor layers are included in the diffraction grating, the shape of the diffraction grating is maintained during the vapor phase deposition of the fourth semiconductor layer. Therefore, the thickness, amplitude, and pitch of the diffraction grating that determine the optical coupling constant are controlled with high precision.

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