Semiconductor microactuator

Details Semiconductor microactuator Semiconductor microactuator

1989-06-23

1991-12-03

Rosenthal, Arnold

Valves and valve actuation

Heat or buoyancy motor actuated

251331, 25112901, 356345, 60528, 60529, F16K 714, F16K 3102, G01B 902, F03G 706

Patent

active

050694197

ABSTRACT:
A semiconductor microactuator has a silicon semiconductor substrate having suspension means connected thereto. The suspension means has a first layer of material having a first thermal expansion coefficient and a second layer of material having a second thermal expansion different than the first thermal expansion coefficient and may be a part of a diaphragm or a pair of connecting members. A movable element, which may be a second part of the diaphragm or a boss, is connected to the suspension to be displaced thereby as the temperature of the first and second layers of material is varied. The displacement is solely irrotational with respect to the semiconductor substrate.

REFERENCES:
patent: 4318071 (1982-03-01), Shepherd
patent: 4756508 (1988-07-01), Giachino et al.
patent: 4825262 (1989-04-01), Mallinson
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4864824 (1989-09-01), Gabriel et al.

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