Valves and valve actuation – Heat or buoyancy motor actuated
Patent
1989-06-23
1991-12-03
Rosenthal, Arnold
Valves and valve actuation
Heat or buoyancy motor actuated
251331, 25112901, 356345, 60528, 60529, F16K 714, F16K 3102, G01B 902, F03G 706
Patent
active
050694197
ABSTRACT:
A semiconductor microactuator has a silicon semiconductor substrate having suspension means connected thereto. The suspension means has a first layer of material having a first thermal expansion coefficient and a second layer of material having a second thermal expansion different than the first thermal expansion coefficient and may be a part of a diaphragm or a pair of connecting members. A movable element, which may be a second part of the diaphragm or a boss, is connected to the suspension to be displaced thereby as the temperature of the first and second layers of material is varied. The displacement is solely irrotational with respect to the semiconductor substrate.
REFERENCES:
patent: 4318071 (1982-03-01), Shepherd
patent: 4756508 (1988-07-01), Giachino et al.
patent: 4825262 (1989-04-01), Mallinson
patent: 4859060 (1989-08-01), Katagiri et al.
patent: 4864824 (1989-09-01), Gabriel et al.
IC Sensors Inc.
Rosenthal Arnold
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