Semiconductor memory device and a method of manufacturing the sa

Details Semiconductor memory device and a method of manufacturing the sa Semiconductor memory device and a method of manufacturing the sa

1983-10-26

1990-05-15

Wojciechowicz, Edward J.

357 239, 357 2311, 357 2314, 357 49, 357 52, 357 54, 357 55, 357 59, 357 71, H01L 2978

Patent

active

049262220

ABSTRACT:
A semiconductor memory device and a method of manufacturing the device wherein a field insulation is formed in a surface of a semiconductor body except for the source, drain and channel regions, a first floating gate is self-aligned to the channel region, a second gate insulated from the first floating gate covers the first floating gate and the first insulator having a width substantially same as the length of the channel region between the source and the drain regions.

REFERENCES:
patent: 3899373 (1975-08-01), Antipov
patent: 4112509 (1978-09-01), Wass
patent: 4122544 (1978-10-01), McElroy
patent: 4272774 (1981-06-01), Boettcher

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