Semiconductor mechanical quantity sensor

Details Semiconductor mechanical quantity sensor Semiconductor mechanical quantity sensor

2005-12-13

2005-12-13

Noori, Max (Department: 2855)

Measuring and testing

Dynamometers

Responsive to multiple loads or load components

Reexamination Certificate

active

06973844

ABSTRACT:
A semiconductor mechanical quantity sensor includes two sensor chips (100a,100b) having the same structure and the same characteristics formed on semiconductor substrates (10a,10b), arranged on a circuit chip (6) in the same direction. There may be used a sensor chip having two sensors of the same structure formed in one semiconductor substrate in the same direction. The number of the sensors may be three or more. A plurality of sensors may be stacked on the semiconductor substrate or on the circuit chip, or may be arranged on both surfaces of the semiconductor substrate (10a,10b) or the circuit chip (6).

REFERENCES:
patent: 5497668 (1996-03-01), Okada
patent: 5894091 (1999-04-01), Kubota
patent: 6171881 (2001-01-01), Fujii
patent: 6414381 (2002-07-01), Takeda
patent: 6462530 (2002-10-01), Layton
patent: 2002/0011111 (2002-01-01), Otsuchi et al.
patent: A-2000-9470 (2000-01-01), None

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