Semiconductor material handling system

Details Semiconductor material handling system Semiconductor material handling system

2007-05-22

2010-02-16

Rodríguez, Saúl J (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S744800, C414S941000, C294S103100, C294S119100

Reexamination Certificate

active

07661921

ABSTRACT:
A semiconductor material handling system including a frame mounting a wafer cassette and a plurality of load ports thereon, and a wafer moving robot including a robot body which has a lifting member mounted in the frame and vertically moving along a predetermined lifting shaft, an articulated arm which has a driving link mounted in the lifting member and a plurality of driven links whose end part transversely moving along the frame having the load ports, a swing unit which is mounted in the end part of the driven links and rotates along a vertical rotation shaft, and a crossing arm which comprises a base mounted in the swing unit, a plurality of sliding units mounted in the base and reciprocating transversely, and a wafer hand mounted in the sliding units and picking up a wafer from the wafer cassette and storing the wafer back in the wafer cassette.

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