Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2007-05-15
2007-05-15
Fox, Charles A. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C414S416080, C414S939000, C250S559290
Reexamination Certificate
active
10087092
ABSTRACT:
The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.
REFERENCES:
patent: 5306380 (1994-04-01), Hiroki
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5645391 (1997-07-01), Ohsawa et al.
patent: 6013920 (2000-01-01), Gordon et al.
patent: 6053983 (2000-04-01), Saeki et al.
patent: 6091498 (2000-07-01), Hanson et al.
patent: 6135698 (2000-10-01), Bonora et al.
patent: 6138721 (2000-10-01), Bonora et al.
patent: 6142722 (2000-11-01), Genov et al.
patent: 6155768 (2000-12-01), Bacchi et al.
patent: 6188323 (2001-02-01), Rosenquist et al.
patent: 6220808 (2001-04-01), Bonora et al.
patent: 6261044 (2001-07-01), Fosnight et al.
patent: 6281516 (2001-08-01), Bacchi et al.
patent: 6520727 (2003-02-01), Babbs et al.
patent: 2 778 496 (1998-05-01), None
patent: WO 99/39386 (1999-08-01), None
patent: 2001031211 (2001-06-01), None
patent: WO 01/10756 (2001-02-01), None
patent: WO 01/14227 (2001-03-01), None
U.S. Appl. No. 10/087,400, Bonora et al.
U.S. Appl. No. 10/087,638, Bonora et al.
U.S. Appl. No. 09/729,463, filed Jun. 6, 2002, R. Hine et al.
U.S. Appl. No. 09/115,414, Rosenquist et al.
U.S. Appl. No. 10/194,702, filed Jul. 12, 2002, Hine.
Bonora Anthony C.
Gould Richard H.
Hine Roger G.
Krolak Michael
Speasl Jerry A.
Asyst Technologies, Inc.
Fox Charles A.
O'Melveny & Myers LLP
LandOfFree
Semiconductor material handling system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor material handling system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor material handling system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3825903