Semiconductor material classification device

Details Semiconductor material classification device Semiconductor material classification device

1999-09-01

2001-07-24

Walsh, Donald P. (Department: 3653)

Classifying, separating, and assorting solids

Sorting special items, and certain methods and apparatus for...

Condition responsive means controls separating means

C209S577000, C209S639000, C209S939000, C209S587000, C382S149000, C382S108000, C382S145000

Reexamination Certificate

active

06265683

ABSTRACT:

TECHNICAL FIELD
The invention relates to a device and to a method for the optoelectronic classification of semiconductor materials.
BACKGROUND ART
In order to produce monocrystalline ingots from polycrystalline ingots, the polycrystalline ingots are broken up into fragments of about 100 mm diameter. These fragments are used to fill a crucible in Czochralski crystal pulling (CZ crystal pulling). Since the surface of the ingots varies in roughness at different positions, the breaking gives rise to fragments which have these rough surface portions. At present, the parts with, for example, cracks, protrusions (popcorn), craters (verbal classification) etc. are manually sorted out by trained personnel before they reach the crucible for CZ crystal pulling, because this defective material causes quality reductions in the method there.
SUMMARY OF INVENTION
The object of the invention is to develop a device and a method which sorts out defective fragments without the use of subjective decisions by personnel. These and other objects are achieved by the invention.


REFERENCES:
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English Derwent Abstract AN 98-570369149 corresponding to EP 0876851 A1.
Patent Abstract of Japan, vol. 18, No. 574 (P-1821), Nov. 2, 1994, JP 06213637 (Tokyo Gas Co. Ltd.) Aug. 5, 1994.

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