Semiconductor manufacturing/testing ceramic heater,...

Details Semiconductor manufacturing/testing ceramic heater,... Semiconductor manufacturing/testing ceramic heater,...

2005-11-22

2005-11-22

Fuqua, Shawntina (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S465100, C219S466100, C219S467100, C219S543000, C219S544000, C219S548000, C219S460100, C029S610100, C029S611000, C029S620000

Reexamination Certificate

active

06967312

ABSTRACT:
A process for producing a ceramic heater includes forming a resistance heating element on a surface of a ceramic substrate. The resistance heating element is divided into plural sections. Resistivities of the plural sections are measured, respectively. Each of the plural sections is trimmed according to a comparison between the resistivities of the plural sections.

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