Semiconductor manufacturing system having a bar-code interface

Details Semiconductor manufacturing system having a bar-code interface Semiconductor manufacturing system having a bar-code interface

1997-01-22

1998-10-27

Barlow, John

Data processing: measuring, calibrating, or testing

Measurement system

Remote supervisory monitoring

36446822, 36446823, 36446828, G06F 1900

Patent

active

058289895

ABSTRACT:
A process run card encoded with bar-code information and providing controllers with scanners which can scan the bar-code information and configure the controller accordingly is disclosed. Such a system advantageously provides a semiconductor manufacturing system controller which minimizes or reduces the problems associated with having to reprogram controllers for various lots. Such a system also provides a mechanism for preventing the erroneous re-processing of semiconductor material which has already received a timed processing step.

REFERENCES:
patent: 4930086 (1990-05-01), Fukasawa
patent: 5325582 (1994-07-01), Glaser et al.
patent: 5375061 (1994-12-01), Hara et al.
patent: 5432702 (1995-07-01), Barnett
patent: 5434790 (1995-07-01), Saka et al.
Master.RTM. Bar Code Multi-Interface Controllers User Manual, Copyright Feb. 1993: pp. A-H thru 1-92.
Percon Series 10 Complete Parameter Listing and Bar Codes, May 20, 1992, no pg. #'s.
Master.RTM. Bar Code Multi-Interface Controller; Quick and Simplified Activation of the Keyboard Wedge Mode; no pg. #'s date unknown.
Opticon, "MR-1100 Hand-Held CCD Scanner with 3" DOF, PP. 1-2 date unknown.
Santa Clara Plastics, "Model 3152-1400A Sub-Ambient System", Nov. 21, 1988, pp. 1-1 thru 10-9.

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