Semiconductor manufacturing system, controller,...

Details Semiconductor manufacturing system, controller,... Semiconductor manufacturing system, controller,...

2008-02-19

2010-12-14

Rodriguez, Paul L (Department: 2123)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S020000, C700S108000, C700S282000

Reexamination Certificate

active

07853347

ABSTRACT:
A semiconductor manufacturing system includes a semiconductor manufacturing apparatus, a first controller for controlling the semiconductor manufacturing apparatus, an auxiliary machine for the semiconductor manufacturing apparatus, a second controller for controlling the auxiliary machine, and a third controller for electrically coupling the first and second controllers. The second controller outputs an auxiliary machine-in-operation signal to the third controller when the auxiliary machine is operating, outputs an auxiliary machine-stopping signal to the third controller when the auxiliary machine is stopping, and operates or stops the auxiliary machine according to an instruction signal received from the third controller. The first controller receives the auxiliary machine-in-operation signal or the auxiliary machine-stopping signal via the third controller, and keeps the semiconductor manufacturing apparatus in operation or on standby when the first controller is receiving the auxiliary machine-in-operation signal. The third controller stops the auxiliary machine when the third controller detects that the semiconductor manufacturing apparatus is on standby, and outputs the auxiliary machine-in-operation signal, instead of the auxiliary machine-stopping signal received from the second controller, to the first controller.

REFERENCES:
patent: 6889105 (2005-05-01), Mukuta et al.
patent: 2008/0262655 (2008-10-01), Smith et al.
patent: A-2006-222264 (2006-08-01), None

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