Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2007-04-24
2007-04-24
Lillis, Eileen D. (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S939000, C156S345300, C211S041800
Reexamination Certificate
active
10839711
ABSTRACT:
A semiconductor manufacturing system and wafer holder for a semiconductor manufacturing system which prevents a semiconductor wafer from being exposed to a process reaction and which includes a reaction tube for providing a sealed process space and a dual boat and which prevents the backside deposition by the wafer holder. The wafer holder includes a holder body to hide the backside of the semiconductor wafer during a process in the reaction tube and a wafer lifter having a portion that can be disengaged from and coupled to the holder body so that a lower portion of the semiconductor wafer is supported by the dual boat and so that the semiconductor wafer can be lifted up from the wafer body when the semiconductor wafer is loaded and unloaded. A separation boundary between the holder body and the wafer lifter includes a gas inflow interception surface to hinder reaction gas from flowing through the separation boundary.
REFERENCES:
patent: 5219079 (1993-06-01), Nakamura
patent: 5275521 (1994-01-01), Wada
patent: 5515986 (1996-05-01), Turlot et al.
patent: 5718574 (1998-02-01), Shimazu
patent: 5752609 (1998-05-01), Kato et al.
patent: 5882417 (1999-03-01), van de Ven et al.
patent: 5925411 (1999-07-01), van de Ven et al.
patent: 5947718 (1999-09-01), Weaver
patent: 5984607 (1999-11-01), Oosawa et al.
patent: 6296735 (2001-10-01), Marxer et al.
patent: 6321680 (2001-11-01), Cook et al.
patent: 6435798 (2002-08-01), Satoh
patent: 6485248 (2002-11-01), Taylor, Jr.
patent: 6517303 (2003-02-01), White et al.
patent: 6533534 (2003-03-01), Schmitt et al.
patent: 6780251 (2004-08-01), Tometsuka
patent: 6799940 (2004-10-01), Joe et al.
patent: 6935466 (2005-08-01), Lubomirsky et al.
patent: 2002/0187023 (2002-12-01), Araki
patent: 2003/0049372 (2003-03-01), Cook et al.
patent: 2003/0168439 (2003-09-01), Kanno et al.
patent: 2004/0105742 (2004-06-01), Park et al.
patent: 2005/0126482 (2005-06-01), Jeong et al.
Bushnell , Esq. Robert E.
Greenhut Charles
Lillis Eileen D.
Terasemicon Co., Ltd
LandOfFree
Semiconductor manufacturing system and wafer holder for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor manufacturing system and wafer holder for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor manufacturing system and wafer holder for... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3795057