Semiconductor manufacturing system and method of...

Details Semiconductor manufacturing system and method of... Semiconductor manufacturing system and method of...

2008-01-22

2010-12-14

Hopkins, Robert A (Department: 1797)

Gas separation

Combined or convertible

In environmental air enclosure

C096S135000, C454S187000

Reexamination Certificate

active

07850752

ABSTRACT:
A semiconductor manufacturing system, having a filter that is disposed in a clean room and removes an organic solvent containing siloxane from a gas supplied from the outside of said clean room; a first semiconductor manufacturing apparatus that is disposed in said clean room and uses light in an atmosphere containing the gas having passed through said filter; a second semiconductor manufacturing apparatus that is disposed in said clean room and has an exhaust gas outlet for discharging a gas containing an organic solvent containing siloxane; and a removing device that is disposed at said exhaust gas outlet of said second semiconductor manufacturing apparatus, filters out the organic solvent containing siloxane from the exhaust gas output from said exhaust gas outlet, and discharges the filtered gas into an exhaust gas duct for discharging the exhaust gas to the outside of said clean room.

REFERENCES:
patent: 7141221 (2006-11-01), Irie et al.
patent: 2006/0117722 (2006-06-01), Kuo et al.
patent: 9-145112 (1997-06-01), None

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