Semiconductor manufacturing system and control method thereof

Details Semiconductor manufacturing system and control method thereof Semiconductor manufacturing system and control method thereof

2005-01-04

2005-01-04

Rodriguez, Paul (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

06839603

ABSTRACT:
In a semiconductor manufacturing system, operations of a plurality of processing apparatuses are controlled so as to efficiently manufacture semiconductor devices. The semiconductor manufacturing system having at least one processing apparatus for applying a process to semiconductor substrates. A memory part (5) stores priority-level data which indicates a priority level of the process to be applied to each of the semiconductor substrates on an individual semiconductor substrate basis. A control part (3, 7) controls the processing apparatus to apply the process to a newly supplied one of the semiconductor substrates by determining an order of processing the newly supplied one of the semiconductor substrates being supplied to the processing apparatus based on a comparison of new priority-level data with the priority-level data stored in the memory part with respect to the semiconductor substrates of which process has been scheduled, the new priority-level data being supplied in response to the newly supplied one of the semiconductor substrates being supplied to the processing apparatus.

REFERENCES:
patent: 4887218 (1989-12-01), Natarajan
patent: 5399531 (1995-03-01), Wu
patent: 5586021 (1996-12-01), Fargher et al.
patent: 5751580 (1998-05-01), Chi
patent: 5787000 (1998-07-01), Lilly et al.
patent: 5975740 (1999-11-01), Lin et al.
patent: 6074443 (2000-06-01), Venkatesh et al.
patent: 6438436 (2002-08-01), Hohkibara et al.
patent: 6470231 (2002-10-01), Yang et al.
patent: 06203042 (1994-07-01), None
patent: 0914541 (1997-06-01), None
patent: 11184925 (1999-07-01), None
patent: 2000084801 (2000-03-01), None
patent: 2000099111 (2000-04-01), None
patent: 2000296442 (2000-10-01), None

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