Semiconductor manufacturing resolution enhancement system...

Details Semiconductor manufacturing resolution enhancement system... Semiconductor manufacturing resolution enhancement system...

2006-02-07

2006-02-07

Gilliam, Barbara L. (Department: 1752)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

C430S311000, C430S312000, C430S320000, C430S321000, C430S322000, C430S323000, C430S324000

Reexamination Certificate

active

06994939

ABSTRACT:
A method and system of making a mask with a transparent substrate thereon is provided. A first resolution enhancement structure is formed on the first portion of the transparent substrate. A second resolution enhancement structure is formed on a second portion of the transparent substrate, with the second resolution enhancement structure different from the first resolution enhancement structure.

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