Semiconductor manufacturing non-processing apparatuses with stor

Details Semiconductor manufacturing non-processing apparatuses with stor Semiconductor manufacturing non-processing apparatuses with stor

1997-01-28

2000-10-10

Grant, William

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

700112, 700113, 700108, 700120, G06F 1900

Patent

active

061310522

ABSTRACT:
A semiconductor manufacturing system capable of reducing time required for manufacture of semiconductors with effective use of waiting time of lots in storage equipment is provided. While a lot including a plurality of semiconductor wafers are stored in storage equipment, the semiconductor wafers in the lot are subjected to non-processing steps carried out by non-processing apparatuses such as measuring apparatuses, inspecting apparatuses, and contaminant removing apparatuses.

REFERENCES:
patent: 3976330 (1976-08-01), Babinski et al.
patent: 4027246 (1977-05-01), Caccoma et al.
patent: 5164905 (1992-11-01), Iwasaki et al.
patent: 5166884 (1992-11-01), Maney et al.
patent: 5551830 (1996-09-01), Watanabe et al.

Affiliated with

Also associated with

Rating

Semiconductor manufacturing non-processing apparatuses with stor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor manufacturing non-processing apparatuses with stor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor manufacturing non-processing apparatuses with stor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2263166