Semiconductor manufacturing fault detection and management...

Details Semiconductor manufacturing fault detection and management... Semiconductor manufacturing fault detection and management...

2006-08-08

2006-08-08

Von Buhr, Maria N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

Reexamination Certificate

active

07089072

ABSTRACT:
The present disclosure provides a semiconductor manufacturing fault detection and management system and method for monitoring at least one manufacturing entity to detect state changes.

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Goodlin, Brian E., et al., “Simultaneous Fault Detection and Classification for Semiconductor Manufacturing Tools”, 201stMeeting of the Electrochemical Society, International Symposium on Plasma Processing XIV, May 2002, 16 pages.

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