Static structures (e.g. – buildings) – Footing or foundation type – Framework spans footings
Reexamination Certificate
2005-04-26
2005-04-26
Glessner, Brian E. (Department: 3635)
Static structures (e.g., buildings)
Footing or foundation type
Framework spans footings
C052S294000, C052S749100, C248S678000, C248S679000
Reexamination Certificate
active
06883283
ABSTRACT:
A semiconductor manufacturing facility has a proper strength and an anti-vibration effect. The semiconductor facility contains processing apparatuses, installation tables and an installation floor. An apparatus having a vibration source is installed on an installation table having a rigid structure. The installation table is installed on the installation floor having a floor construction including a plurality of columns, which support a floor member extending in horizontal directions. An interval of the columns is 4 m to 12 m.
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Fujihara Kaoru
Kobayashi Sadao
Suenaga Osamu
Yamamoto Kazuo
Glessner Brian E.
Pillsbury & Winthrop LLP
TAISEI Corporation
Tokyo Electron Limited
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