Semiconductor manufacturing equipment and method for carrying wa

Details Semiconductor manufacturing equipment and method for carrying wa Semiconductor manufacturing equipment and method for carrying wa

1997-08-05

1998-09-22

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414416, 414937, 414939, B65G 4907

Patent

active

058105387

ABSTRACT:
A semiconductor manufacturing equipment, which comprises a boat elevator installed below a reaction chamber for loading a boat into the reaction chamber, cassette stocker installed opposite to the boat elevator, a wafer carrier installed between the cassette stocker and the boat elevator and used for transferring wafers between the cassette stocker and the boat, and a load-lock chamber for accommodating the boat elevator, whereby wafers are carried in the atmospheric air within the semiconductor manufacturing equipment, and the transport time is set in such manner that an increase of a natural oxide film formed on the wafers is 2 angstroms or less.

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