Semiconductor manufacturing apparatus having a movable-area cove

Horizontally supported planar surfaces – Plural related horizontal surfaces – Detachable enlarging or substitute surface

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Details

A47B 1308

Patent

active

052018040

ABSTRACT:
A covering mechanism for covering an area in which a movable table, etc. of, for example, semiconductor assembling machines using a flexible sheet cover that has elasticity. One end of the cover is fastened to a take-up shaft and the other end to a movable member that moves over the movable table, etc. in the direction perpendicular to the take-up shaft. The cover wrapped around the take-up shaft is stretched out when the movable member is moved away from the take-up shaft, thus covering the table. When the movable member is moved towards the take-up shaft, the cover, with the elasticity, is back to be wrapped around the take-up shaft. By arranging a plurality of take-up shafts at right angles, the covers can stretch in the directions perpendicular to each other, thus covering a wider area in which an X-Y table is moved around.

REFERENCES:
patent: 1237170 (1917-08-01), Cline
patent: 1505003 (1924-08-01), Pylick
patent: 1952775 (1934-03-01), Quinlan
patent: 2515466 (1950-07-01), Nahmens

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