Semiconductor-manufacturing apparatus equipped with cooling...

Details Semiconductor-manufacturing apparatus equipped with cooling... Semiconductor-manufacturing apparatus equipped with cooling...

2005-03-08

2008-12-23

Fox, Charles A (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S805000

Reexamination Certificate

active

07467916

ABSTRACT:
A wafer transfer apparatus includes: (A) a mini environment that connects to a wafer storage part and a load lock chamber and is equipped with a transfer robot inside, in order to transfer wafers between the wafer storage part and load lock chamber in the presence of air flows; and (B) a cooling stage that opens and connects to the mini environment from the outside of the mini environment in the vicinity of the connection port of the load lock chamber, in order to temporarily hold a wafer so that the wafer is cooled by the air taken in from the mini environment.

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