Fluid handling – Line condition change responsive valves – Pilot or servo controlled
Reexamination Certificate
2006-09-19
2006-09-19
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Line condition change responsive valves
Pilot or servo controlled
C137S613000, C073S001350, C702S100000
Reexamination Certificate
active
07108009
ABSTRACT:
An opening/closing of a plurality of valves are controlled so that a plurality of gases flow into a chamber in an operation of a semiconductor manufacturing apparatus, and the opening/closing of the plurality of valves are controlled so that a gas A flows into mass flowmeters in an inspection of a mass flow controller MFC2′. Therefore, the inspection can be achieved while maintaining the connection of mass flow controller MFC2′ to the semiconductor manufacturing apparatus.
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Krishnamurthy Ramesh
McDermott Will & Emery LLP
Renesas Technology Corp.
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