Semiconductor manufacturing apparatus and semiconductor...

Details Semiconductor manufacturing apparatus and semiconductor... Semiconductor manufacturing apparatus and semiconductor...

2006-07-25

2006-07-25

Knight, Anthony (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S121000, C700S002000, C438S541000, C156S345260

Reexamination Certificate

active

07082346

ABSTRACT:
A semiconductor manufacturing apparatus which continuously executes oxidation and CVD in a multiprocess apparatus includes an internal apparatus controller which selects the type of process and supplies a start signal and stop signal for the process to the multiprocess apparatus, and a process controller which calculates the process state for each process on the basis of the internal information of the apparatus. Upon receiving the stop signal from the controller, the controller sends the stop signal to the multiprocess apparatus to stop the current process by the multiprocess apparatus and switches to the next process.

REFERENCES:
patent: 5994209 (1999-11-01), Yieh et al.
patent: 6240330 (2001-05-01), Kurtzberg et al.
patent: 6772034 (2004-08-01), Shi et al.
patent: 6802933 (2004-10-01), Khan et al.
patent: 6913938 (2005-07-01), Shanmugasundram et al.
patent: 63-318130 (1988-12-01), None
patent: 08-055145 (1996-02-01), None
patent: 09-017705 (1997-01-01), None
patent: 11-042537 (1999-02-01), None
patent: 11-288856 (1999-10-01), None

Affiliated with

Also associated with

Rating

Semiconductor manufacturing apparatus and semiconductor... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor manufacturing apparatus and semiconductor..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor manufacturing apparatus and semiconductor... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3531740