Semiconductor manufacturing apparatus and its diagnosis...

Details Semiconductor manufacturing apparatus and its diagnosis... Semiconductor manufacturing apparatus and its diagnosis...

2006-05-16

2006-05-16

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S109000, C700S117000, C702S084000

Reexamination Certificate

active

07047093

ABSTRACT:
A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.

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