Semiconductor manufacturing apparatus and its diagnosis...

Details Semiconductor manufacturing apparatus and its diagnosis... Semiconductor manufacturing apparatus and its diagnosis...

2005-05-31

2005-05-31

Gandhi, Jayprakash N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S108000, C700S117000, C714S031000

Reexamination Certificate

active

06901306

ABSTRACT:
A semiconductor manufacturing apparatus allows the user to accurately determine the state of the apparatus and the cause of an abnormal condition for a short time. The apparatus includes a main unit for processing raw materials and forming a semiconductor, recording means for recording information of an operation to be executed by the main unit as predetermined data, operating means for operating the operation of said main unit and simulating the operation by using the predetermined data, and display means located remotely from the main unit and for displaying the simulated result.

REFERENCES:
patent: 4964734 (1990-10-01), Yoshida et al.
patent: 5440478 (1995-08-01), Fisher et al.
patent: 6487472 (2002-11-01), Song et al.
patent: 6535774 (2003-03-01), Bode et al.
patent: 2002/0035447 (2002-03-01), Takahashi et al.
patent: 07-282146 (1995-10-01), None
patent: 10-21079 (1998-01-01), None

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