Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-04-11
2006-04-11
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C710S307000, C711S162000, C714S006130
Reexamination Certificate
active
07027888
ABSTRACT:
A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
REFERENCES:
patent: 5696689 (1997-12-01), Okumura et al.
patent: 5838566 (1998-11-01), Conboy et al.
patent: 5884055 (1999-03-01), Tung et al.
patent: 5890207 (1999-03-01), Sne et al.
patent: 5890219 (1999-03-01), Scaringella et al.
patent: 6788990 (2004-09-01), Yanaru et al.
patent: 63-208215 (1988-08-01), None
patent: 07-307262 (1995-11-01), None
patent: 09-153441 (1997-06-01), None
patent: 11-085326 (1999-03-01), None
patent: 2000-164666 (2000-06-01), None
patent: 2000-164667 (2000-06-01), None
patent: 2002-132986 (2002-05-01), None
patent: WO 00/17769 (2000-03-01), None
patent: WO 00/18049 (2000-03-01), None
patent: WO 00/29954 (2000-05-01), None
Hashimoto Koji
Kawano Masamichi
Naya Hidemitsu
Tomiyoshi Rikio
Hitachi High-Technologies Corporation
Lee Douglas S.
Picard Leo
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