Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-09-06
2005-09-06
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C710S307000, C711S162000, C714S006130
Reexamination Certificate
active
06941186
ABSTRACT:
A semiconductor manufacturing apparatus includes: a calculation unit having at least one computer for processing semiconductor design information; a control unit for controlling radiation of an electron in accordance with a processing result of the semiconductor design information; a writing unit for radiating an electron in accordance with instructions of the control unit; and at least one storage device. The semiconductor manufacturing apparatus permits a communication between the storage device, the calculation unit, the control unit, and the writing unit. The semiconductor manufacturing apparatus further includes a communication pass through which the storage device can be controlled.
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U.S. Appl. No. 09/942,425 filed Aug. 29, 2001 corresponds to Japanese Publication No. 63-208215.
Hashimoto Koji
Kawano Masamichi
Naya Hidemitsu
Tomiyoshi Rikio
Hitachi High-Technologies Corporation
Hogan & Hartson LLP
Lee Douglas S.
Picard Leo
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