Semiconductor manufacture apparatus

Details Semiconductor manufacture apparatus Semiconductor manufacture apparatus

1998-04-02

2000-05-02

Warden, Jill

Cleaning and liquid contact with solids

Apparatus

With treating fluid purifying or separating means

134902, 134 3, B08B 300

Patent

active

060559950

ABSTRACT:
A semiconductor manufacture apparatus extending chemical life and reducing chemical replenishing amounts, continuously removes excessive moisture content generated by reaction within the apparatus and can perform cleaning and stripping with stable cleaning performance and stripping performance as a result of removing moisture content in the chemicals. The semiconductor manufacture apparatus is adapted for cleaning a semiconductor substrate or stripping a photoresist applied on the surface of the semiconductor substrate by chemicals, with a moisture separating device preferentially separating moisture content from the chemicals being provided within a passage for recirculating the chemicals within the apparatus.

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"Sulfuric Acid Collection and Refinement System", Clean Technology, Dec. 1992, pp. 30-34.

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