Fishing – trapping – and vermin destroying
Patent
1990-07-20
1992-06-30
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437229, 437978, 430318, H01L 21469, H01L 21312
Patent
active
051262894
ABSTRACT:
An antireflection coating (16) for use with a photolithographic process comprises a layer of organic material that planarizes the surface upon which a photoresist layer (21) is deposited, is highly absorptive of deep ultraviolet actinic light, and can be plasma etched along with an underlying metal layer (11), thereby obviating the need for a separate step to remove the exposed antireflection coating prior to metal etch.
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Anderson R. B.
AT&T Bell Laboratories
Chaudhari C.
Hearn Brian E.
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