Electric heating – Metal heating – By arc
Reexamination Certificate
2005-02-04
2008-10-14
Evans, Geoffrey S (Department: 3742)
Electric heating
Metal heating
By arc
C219S121680, C219S121760, C219S121770
Reexamination Certificate
active
07435927
ABSTRACT:
Multiple laser beams selectively irradiate electrically conductive structures on or within a semiconductor substrate. The structures are arranged in a plurality of substantially parallel rows extending in a generally lengthwise direction. One method propagates first and second laser beams along respective first and second propagation paths having respective first and second axes incident at respective first and second locations on or within the semiconductor substrate at a given time. The first and second locations are either on a structure in their respective rows or between two adjacent structures in their respective rows, which are distinct. The second location is offset from the first location by some amount in the lengthwise direction of the rows. The method moves the laser beam axes substantially in unison in the lengthwise direction of the rows relative to the semiconductor substrate, so as to selectively irradiate structures in the rows with the laser beams.
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Baird Brian W.
Bruland Kelly J.
Lo Ho Wai
Swaringen Stephen N.
Electron Scientific Industries, Inc.
Evans Geoffrey S
Stoel Rives LLP
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