Semiconductor light receiving device and method of manufacturing

Fishing – trapping – and vermin destroying

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136252, 136256, 1566441, H01L 31236

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active

057312133

ABSTRACT:
A semiconductor light receiving device includes a semiconductor crystal substrate having a principle plane which almost coincides with a crystal face having a low order face orientation index, a light detecting portion, formed on a surface of the semiconductor crystal substrate or inside the semiconductor crystal substrate, for converting incident light into an electric signal, and a light incident region formed on the principle plane of the semiconductor crystal substrate, for guiding light into the light detecting portion. The surface of at least the optical incident region on the principle plane of the semiconductor crystal substrate is an uneven surface constituted by a large number of crystal faces each having a face orientation index having an order higher than that of the crystal face of the semiconductor crystal substrate. As a result, a surface inclined with respect to incident light is obtained without inclining the semiconductor light receiving device itself with respect to the incident light, and the light receiving device can easily be mounted on an optical semiconductor device, so that a decrease in S/N ratio of an output signal and degradation of minimum light receiving output characteristics can be prevented.

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